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本帖最后由 wfh0504 于 2016-10-12 16:57 编辑
Cleanrooms andassociated controlled environments -- Part 14: Assessment of suitability foruse of equipment by airborne particle concentration Abstract ISO 14644-14:2016 specifies a methodology to assess the suitability ofequipment (e.g. machinery, measuring equipment, process equipment, componentsand tools) for use in cleanrooms and associated controlled environments, withrespect to airborne particle cleanliness as specified in ISO 14644‑1. Particlesizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644‑1). NOTE Where regulatory agencies impose supplementary guidelines orrestrictions, appropriate adaptation of the assessment methodology can berequired. The following items are not covered by this ISO 14644-14:2016: - assessment of suitability with respect to biocontamination; - testing for suitability of decontamination agents and techniques; - cleanability of equipment and materials; - requirements on design of equipment and selection of materials; - physical properties of materials (e.g. electrostatic, thermalproperties); - optimizing performance of equipment for specific process applications; - selection and use of statistical methods for testing; -protocols and requirements for local safety regulations.
[size=1.4][tr=transparent]- physical properties of materials (e.g. electrostatic, thermal properties); [size=1.4][tr]- optimizing performance of equipment for specific process applications; [size=1.4][tr]- selection and use of statistical methods for testing; [size=1.4][tr]- protocols and requirements for local safety regulations.（网站拷贝）
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发表于 2016-10-12 16:55:06
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ISO官方的网站很有用，